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Get the codeThis article acts as a comprehensive supplement to the original manual. We will cover:
You can request documentation directly from the MKS Support Portal by providing your unit's serial number.
As of April 2026, the ASTRON 2L is available through specialized semiconductor equipment retailers:
Since the Astron 2L is an older but reliable "workhorse" model, the best way to get the specific Revision C (or later) manual is through these channels:
MKS Remote Plasma Refurbishment Data Sheet : Outlines maintenance procedures and service center information.
This article acts as a comprehensive supplement to the original manual. We will cover:
You can request documentation directly from the MKS Support Portal by providing your unit's serial number.
As of April 2026, the ASTRON 2L is available through specialized semiconductor equipment retailers:
Since the Astron 2L is an older but reliable "workhorse" model, the best way to get the specific Revision C (or later) manual is through these channels:
MKS Remote Plasma Refurbishment Data Sheet : Outlines maintenance procedures and service center information.